Multi-atmosphere furnace | Thermal CVD coating furnace for vaporizing liquid raw materials
Consideration of thermal CVD coating for narrow gaps, inner surfaces, and recesses using a vaporizer and multi-atmosphere furnace.
In conventional coating methods, it is common to apply a raw material solution to the surface of the component and then fire it in an electric furnace after drying. However, for components with narrow gaps, inner surfaces, recesses, and steps, uneven application and uncoated areas are likely to occur, leading to issues with variations in application amount, drying shrinkage, and post-firing film thickness. Our multi-atmosphere furnace can be configured not only for the Wetter method but also to introduce liquid raw materials and organometallic precursors through a vaporizer, functioning as a thermal CVD furnace. By stably supplying the raw materials with the vaporizer and introducing them into the furnace with a carrier gas, it can be utilized for process development involving film formation and coating on the component surface through gas-phase reactions. 【Features】 ■ Supports vapor introduction of liquid raw materials and organometallic precursors ■ Allows for examination of thermal CVD, surface modification, and coating conditions ■ Enables consideration of film formation on components with narrow gaps, inner surfaces, recesses, and steps ■ Expected to shorten processes by omitting application and drying steps *For more details, please download the materials or contact us.
- Company：サーモニックENG
- Price：Other
